Structure of the modulators. Figures 1(a) and 1(b) show schematics of the proposed optical modulators composed of ion gel and single-layer graphene (ISLG), and double-layer graphene (DLG), respectively. In the figures, p is the period, f is the fill factor, h is the height of Si, and θ is the incident angle. The refractive indices of Si, ion gel, and SiO2 are 3.45, 1.45 and 1.45, respectively. The permittivity of graphene is calculated from the Kubo formula37, and the height of the graphene layer is assumed to be 0.34 nm. Ion gel is used for the electrical doping of graphene in the ISLG modulator structure. The electric double layer with extremely high capacitance at the graphene-ion gel interface enables the chemical potential (Fermi level) of graphene to be adjusted with a low electric gate voltage38–40. In the DLG structure, graphene doping is implemented by applying a gate voltage between two graphene layers.
First, we designed a photonic crystal structure to induce a BIC phenomenon. Figure 2 shows the reflection spectrum as a function of the incident angle in the proposed photonic crystal structure without graphene layers. We used the following parameters: p = 870 nm, h = 150 nm, and f = 0.3. The BIC phenomenon is observed near λ = 1.54 µm and θ = 12°, and the reflection peak (transmission dip) disappears in this region due to the infinite Q because of BIC.
We investigated the variation in the transmission spectra for Fermi level variation in the proposed ISLG structure. In this case, the BIC disappears owing to the graphene loss; Q is inversely proportional to the loss, and the loss of graphene breaks the infinite Q condition of the BIC. However, an ultra-high Q is maintained because the loss of doped graphene is insignificant, which facilitates the design of high-performance modulators. Figure 3(a) shows the transmission spectra of the ISLG for the Fermi level variation from EF = 0.4 eV to 0.7 eV at the incident angle of θ = 11.937°, where very high Q is supported. The other parameters are assumed to be the same as in the previous calculations. As increase in the Fermi level leads to a decrease in the graphene loss, the Q of the transmission dip increases with an increase in the Fermi level. The Q of the resonance for EF = 0.7 eV is Q ~ 2×105, and it can be simply increased by adjusting the incident angle. In addition, it has been shown that increasing the Fermi level of graphene leads to a transmission dip blue shift because the permittivity of graphene decreases as the Fermi level increases. Generally, graphene doping (Fermi level variation) has little effect on tuning the resonant wavelength in resonators because the variation of the graphene permittivity does not significantly change the effective index of the structure due to the very thin graphene. However, in this ultra-high Q resonance system, a small resonant wavelength tuning results in a very high transmission variation. The transmission variation for the Fermi level variation at λ = 1.55013 µm is shown in Fig. 3(b). The transmission becomes approximately zero and one at EF = 0.615 and EF > 0.66 eV, respectively. Therefore, a very high modulation efficiency was achieved: MD = 0.9972 and IL = 0.0034, where the modulation depth was obtained as MD = (Ton-Toff)/Ton.
Figure 4 shows the transmission spectra for the mobility variation from µ = 0.1 m2/Vs to µ = 10 m2/Vs. Because the mobility is inversely proportional to the loss, a higher Q-factor is observed for a higher graphene mobility. However, the high Q-factor is maintained even though the mobility is µ = 0.1 m2/Vs, and the transmission spectra for µ > 0.5 m2/Vs are almost the same. Therefore, a high modulation efficiency can be sustained for µ > 0.5 m2/Vs. Note that a mobility of µ = 0.5 m2/Vs can be obtained from the chemical vapor deposition (CVD) method that is considered the most promising method for producing graphene41,42.
Although the ion gel-based modulator shows outstanding modulation performance, the low stability and slow modulation speed of the ion gel are obstacles to realizing high-speed optical modulators. To solve these problems, we designed an optical modulator composed of two graphene layers (Fig. 1(b)). By applying a gate voltage between the two graphene layers, stable high-speed graphene doping is possible. Figure 5(a) shows the transmission spectra for the Fermi level variation. The Q of the resonance is slightly reduced compared to that of ISLG owing to the multiplied graphene loss. However, this modulator also supports a very high Q transmission. The transmission variation for the Fermi level at an operating wavelength of λ = 1.55028 µm is illustrated in Fig. 5(b). The calculated modulation depth and insertion loss are approximately MD = 0.9889 and IL=0.011, respectively. The modulation depth was slightly reduced, and the insertion loss slightly increased. However, very high modulation performances are maintained.