We developed a compact combinatorial instrument for the rapid synthesis of Fe–Co–Cr ternary thin films with a composition gradient. The system consists of a table-top multi-source DC magnetron sputtering instrument, a custom-manufactured sputter beam aperture made by a 3D printer for controlling the direction and diffusion of the sputtered particles, and a commercially available transmission electron microscopy (TEM) grid. The beam aperture was 3D-printed using titanium powder and was designed such that the three cylindrical entrance holes converge into one exit hole. The individual hole diameters are 2.3 mm, and the aperture is 4 mm thick as shown in Fig. 1(a) and 4(a). The creation of the aperture began with the design of a 3D model of the jig using Autodesk MAYA, fabrication of a resin jig prototype in Da Vinci 1.0AiO, and then fabrication of the metal jig on a metal 3D printer. A TEM grid with 30 µm × 30 µm square holes was attached to the exit side of the aperture. We used a commercially available copper TEM grid by VECO (400 mesh, thickness 25 µm). Fe, Co, and Cr were deposited obliquely on a SiO2/Si substrate by DC magnetron sputtering to prepare a ternary thin film with a composition gradient. The typical sputtering conditions were as follows: base pressure of 9.03×10−4 Pa, Ar+ pressure of 1.0 Pa, sputtering current of 25 mA, and room temperature. Multicomponent layered films with 2 nm-thickness were deposited for each element and the procedure repeated 10 times to obtain a multi-layered film with 30 total layers and a thickness of 60 nm. Subsequently, the specimen was annealed at 600°C for 1 h in-situ to promote alloying. The annealing temperature and time were determined based on the diffusion coefficient of Fe–Cr (7.8×10−9 m2/s), and a sufficient diffusion length (1.78 µm) compared to the film thickness (60 nm)18.
As a prior experiment, we examined two standard Fe-Cr binary thin films with and without annealing. Specimens were prepared as a homogeneous film without the use of the beam aperture and TEM grid. XRD analysis confirmed that the Fe(110) and Cr(110) double peaks merge into a single FeCr(110) peak upon annealing, suggesting that Fe and Cr are intermixing and alloying during annealing (Figure 4 (b)).
For Fe-Co-Cr alloys, chemical maps and magnetic contrast images were measured using a spectroscopic PEEM instrument (Elmitec, SPELEEM) installed at BL17SU of SPring-829–31. Prior to XAS/MCD-PEEM measurement, the surface oxide layer was removed by gentle sputtering with Ar+ ions at 1 kV acceleration voltage, 15 mA of emission current, P = 2.0×10−5 Torr for about 90 minutes, with gentle annealing at 400°C. The XAS and MCD signals were acquired in the same field of view, and the photon energy was continuously scanned at the L absorption edges of Fe, Co, and Cr. The energy scan ranges for Fe, Co, and Cr were 700–730, 770–805, and 570–600 eV, respectively, with a step size of approximately 0.14 eV. The composition ratio was determined from XAS absorption and photoionization cross-section of each element33. The edge height of the L3 absorption peak was normalized by the photoionization cross-section, and the chemical composition of the three elements was given by the ratio of the normalized intensities by following formula.
InomFe = IXASFe / CSFe
CompFe = InomFe / ( InomFe + InomCo + InomCr) ,
where IXASFe is the edge height of L3 peak of Fe, CSFe is the photoionization of Fe, InomFe, InomCo, InomCr are the normalized intensity of each element, and CompFe is resulting composition ratio of Fe. The composition of Co and Cr are determined in the same manner. The absence of an oxidized layer was confirmed from the edge shape of the XAS plot, indicating that the sample was not oxidized (Figure 4 (c))30. MCD contrast was determined by the asymmetry caused by the difference in the helicity of circularly polarised X-rays. The field of view was set to a diameter of 100 µm so that the entire island with a composition gradient was in the viewing field. The resolution of the charge-coupled device (CCD) camera was 1024 × 1024 pixels with 16 bit grey-scale, and the exposure time was 3 s per image. Thus, micro-spectroscopic data composed of approximately 200 images (energy points) were acquired in 10 min. The signal-to-noise (S/N) ratio of a single-pixel spectrum is at most 10%, and the S/N ratio can improve by integrating the pixel information (Figure 4 (d)). Although the typical ROI contains 10,000 pixels, 100 pixel is enough to obtain sufficient S/N for compositional analysis. We prepared semi-automatic macros using the Python modules, namely numpy and pandas, to load the PEEM data, evaluate the composition ratio, analyze MCD signal, and set the ROIs.
The MCD contrast data were correlated with the Fe–Co–Cr composition (divided with a step size of 5 at%) determined from the XAS intensity at the corresponding area. Then, each MCD data cluster was converted into a histogram indicating the distribution of the number of pixels as a function of MCD intensity. The magnetic phase (ferromagnetic or paramagnetic) for each composition was determined from the number of peaks appearing in the histogram. The obtained MCD histograms were quantitatively organised on a Fe–Co–Cr ternary phase diagram. Finally, the MCD histograms were analysed using Landau theory and the critical exponent β was extracted. Landau theory can describe the pseudo-free energy of the system by a simple fourth-order polynomial of an order parameter, which is magnetisation in the case of a magnetic material. Since the specimen may practically have a remanent magnetisation, we left the first-order term as the internal magnetic field for fitting.