Fabrication of atomically thin amorphous PtSex
We used low-temperature deep reactive ion etching (DRIE) with a low-density Argon (Ar) plasma to convert the atomically-thin crystalline PtSe2 (1T phase) film into an amorphous PtSex film. First, a 2-inch wafer-size PtSe2 film with a ~0.6 nm thickness was prepared through a two-step selenylation of Pt metal on a SiO2/Si substrate (explained in Supplementary Figure S1). Then, the as-grown film was etched by DRIE at a low-temperature of -30 oC for 50 seconds to obtain the amorphous PtSex layer (1.2<x<1.3). Figure 1d shows a ~1-nm thickness and wafer-scale PtSex film on a SiO2/Si substrate. With a wet transfer method (as reported in Supplementary Figure S2), a uniform and continuous film was suspended on a Cu-supported lacey carbon transmission electron microscopy (TEM) grid, as shown in Figure 1e.
In order to characterize the synthesized PtSex, we conducted atomic-resolution high-angle annular darkfield (HAADF) imaging via the STEM (Figures 1f-g and Supplementary Figures S3-S4). The dark-field images of the PtSex film show a random distribution of the Pt atoms (bright spots in the image) in the film (Figure 1g). Interestingly, there is no long-range order in the atomic arrangement, indicating that the achieved film is amorphous. Moreover, the typical FFT spectrum (a 20×20 nm2 area) has a broad and continuous halo (Figure 1f) with no diffraction spots, which better visualizes a complete amorphization through an area of nearly 4000 nm2 (Supplementary Figure S3). Next, we randomly chose five regions in the PtSex film, whose STEM images showed a uniform amorphization process over a large-scale (Supplementary Figure S4). This amorphization process is also verified by Raman spectra, which exhibit nearly negligible characteristic peaks (Eg and A1g) compared to the crystalline PtSe2 film (Figure 1h). Different from previously reported carbon amorphous monolayers13 (0.6 nm thickness), our amorphous PtSex layer is made of Pt and Se atoms with more complicated coordination and, to the best of our knowledge, is the first binary amorphous layer. Notably, our amorphous layer can be thermodynamically stable in a 2D form with a thickness down to 1 nm. Such a highly stable, ultrathin amorphous layer has been long sought, since it can expose nearly all the Pt atoms to electrocatalysis, as will be discussed later.
The formation of the amorphous layer is largely attributed to the low-temperature processing and the low-density Ar plasma. The low-temperature selenylation of Pt films avoids the solid-state dewetting behavior14 to form a porous film (Supplementary Figure S5), and the low-temperature substrate (approximately -30 oC, during DRIE) suppresses the plasma-induced local heating that may cause aggregation of surface atoms and lead to incomplete amorphization (Supplementary Figure S6). The low-density Ar plasma15 drives the phase transition of PtSex smoothly by adjusting the etching duration. During the DRIE process, the original film evolves from a crystalline 1T phase (PtSe2), via a defected-1T phase and then a mixture of amorphous structure/1T phase (PtSe1.3<x<1.4), finally to a completely amorphous structure (PtSe1.2<x<1.3), as shown in Supplementary Figure S7.
We further performed XPS and electrical measurements on the amorphous PtSex, as shown in Figures 1i and Supplementary Figures S8-S9, respectively. In Pt 4f region, Pt(IV) and Pt(II) are observed, while no significant Pt(O) peaks are found. These XPS data at Pt 4f confirm that the amorphous PtSex is a Pt-Se compound but not isolated Pt and Se nanoparticles, consistent with our STEM observations. Moreover, the back-gate electrical measurements (Figure 1j) shows that the amorphous PtSex exhibits a high conductance (a resistivity of ~0.03 Ω mm) and no gating effect (inset of Figure 1j), in contrast to a p-type semiconducting behavior of crystalline PtSe2. This result suggests an amorphization-induced metallization of the PtSex layer.
Formation mechanism of the amorphous PtSex
We then performed ab initio calculations to understand the formation mechanism of amorphous PtSex (see Methods section). To mimic the loss of Se atoms induced by ion etching, Se atoms were removed sequentially from a perfect single-crystal PtSe2 while ensuring that the removed atom at each step is the one that costs minimum energy. Note that our calculations do not consider a real amorphous structure but aim to shed light on the local structural evolution induced by DRIE. To quantify the structural-deformation degree of PtSex induced by the Se removal, we define a parameter based on the displacement of Pt atoms, δPt, expressed by δPt = |Pi-Pi0| with i = 1, 2, … N, where N is the total number of Pt atoms in the supercell, Pi and Pi0 are the positions of ith Pt atom in the PtSex and perfect single-crystal PtSe2, respectively. Then, an averaged displacement of Pt is given by <δPt> =Σ|Pi-Pi0|/N. The sequential Se removal yields a distinct vacancy order in the film, in which each Se vacancy connects to its neighbors with four-coordinated Pt atoms (Figure 2a, top). However, the 1T framework of defective PtSex is barely distorted even when x decreases to 1.5, as supported by calculated δPt and <δPt> shown at the bottom of Figure 2a. These results suggest that the crystalline structure of PtSex (i.e., 1.5<x<2) is rather robust to short-term ion-etching, in line with our experimental results.
Further decreasing the ratio of Se (x<1.5) leads to three-coordinated Pt atoms. Every two of these three-coordinated Pt atoms, resulting from a single Se removal, shift towards each other to stabilize the 2D PtSex (see circles in Figure 2a), then severely disturbing the local bond networks. However, the overall structure remains essentially crystalline if the three-coordinated Pt atoms are insufficiently dense (Figure 2a). In our calculations, both relaxed structures and calculated <δPt> suggest that the local amorphization starts at a Se/Pt ratio of ~1.38, and a complete amorphization occurs at a ratio of 1.33 with <δPt> exceeding 1.0 Å (Figures 2a, 2b and Figures S10-S16, respectively). The amorphization roots in the randomness of creating three-coordinated Pt atoms across the whole layer. For the amorphous PtSe1.33, we already cannot find long-range lattice order within our supercell. The general trend of amorphization agrees with our experimental observation (Supplementary Figure S7). Further decreasing x in 2D PtSex enhances the amorphous characteristic, as evidenced by relaxed structures of PtSe1.33, PtSe1.30, PtSe1.27, and PtSe1.25 (Figures 2a and b).
Experimentally, the detailed amorphous structure is analyzed by mapping the precise position of Pt atoms in PtSex based on our STEM imaging (Figure 2c), which then allowed us to determine the projected distances between two adjacent Pt atoms onto the basal plane. The data for a perfect PtSe2 sheet is taken as a reference. It turns out that the projected Pt-Pt distances in the amorphous PtSe1.33 are peaked at ideal 3.73 Å but exhibit a much broader distribution over 3.0–4.5 Å than those in a perfect PtSe2 (Figure 2d and Supplementary Figure S17). These distances agree well with our ab initio molecular dynamics calculations in terms of the broad distribution and the peak position (Figure 2d), so does the Pt-Se bond angles in the 2D PtSex (Supplementary Figures S18). Such a broad distribution of the bond geometry also echoes the results in the reported amorphous carbon monolayers13 and O–Si–O bonds in a silica bilayer16, featuring a 2D amorphous network without long-ranged order.
Catalytic activity of amorphous PtSex
The hydrogen evolution reaction (HER) activity of the amorphous PtSex is tested using micro-electrochemical cells17,18, as shown in Figure 3a and Supplementary Figure S19. Starting from the same mechanically exfoliated PtSe2 nanosheet, we etched different regions at controlled duration, and obtained regions of perfect single-crystal, defective single-crystal, and amorphous PtSex (Supplementary Figure S20) for comparing their HER activities. The electrocatalytic performance of these regions are summarized in Figure 3b and Supplementary Figures S21: (1) The basal plane of perfect single-crystal is HER-inert, as has been widely measured15,19. (2) At the initial stage of the plasma etching, only isolated Se vacancies are created as active sites, yielding a moderate HER performance (onset potential: ~0.1 V and Tafel slope: ~100 mV dec-1); an increased number of Se vacancies results in an enhanced HER performance. (3) As the treatment continues, amorphous PtSex is formed and exhibits excellent catalytic performance, e.g. onset potential of 0V, Tafel slope of 39 mV dec-1, and current density of 25 mA cm-2 at 50 mV for the PtSe1.26. An abruptly-improved performance is observed during this process due to the transition of the catalytic site, that is, from Se vacancies to amorphous Pt site. In order to elaborate the evolution of active sites, we tested tens of PtSex nanosheets, and plotted their onset potentials and Tafel slopes versus Se/Pt atom ratio in Figure 3c, which confirms our conclusion above.
It is compelling to see that the amorphous PtSex offers comparable catalytic performance to pure Pt, which is feature by onset potential: 0V, Tafel slope: 37 mV dec-1, and current density: 25 mA cm-2 at 50 mV (Figures 3d and 3e). The Tafel curves shown in Figure 3e reveal a similar rate-limiting step for the reaction kinetics between the amorphous PtSex and pure Pt20, which renders the amorphous PtSex with a Pt-like catalytic characteristic. More importantly, the nearly 100% current density indicates a maximal density of active sites enabled by the amorphous structure (Figure 3f). This ratio, to the best of our knowledge, is record-high in current TMD catalysts, especially in light of that the current density is less than 1% in PtX2 (X=S, Se, Te) and other TMDs and ranged between 4-55% in metallic VS2, VSe2, NbS2, Nb1.35S2, and TaS2 catalysts (see Supplementary Figure S22 and Table S1 for comparison).
To gain further insight into the electrocatalytic performance of amorphous PtSex, we calculated Gibbs free energy of adsorbed hydrogen atoms (∆GH) by scanning all possible sites on the surface of an amorphous PtSe1.33. Since the amorphous PtSex layer may provide a layer of Pt sites with different reactivities, taking the hydrogen coverage into account is necessary to evaluate the catalytic activity of the whole layer. The hydrogen coverage21,22 is defined as , where NH is the number of hydrogen atoms and MPt is the total number of Pt sites (Supplementary Figures S23-32). The hydrogen coverage varies from 2.8% to 27.8 %. Unlike Pt in single-atom catalysts (e.g., Pt-doped in TMDs23 and graphene12), the Pt atoms with diverse bond geometries in the amorphous PtSex yield a wide range of ∆GH shown in Figure 3g. If the sites with ∆G (eV) falling in the range (-0.3, 0.3) are considered active, ~ 30% Pt atoms could contribute to the HER at a hydrogen coverage of 28%. Such an unusual high-density of active sites is attributed to three-coordinated Pt atoms that give rise to a high density of states of 5d orbitals near the Fermi level (Supplementary Figure S33). This density sustains across hydrogen coverages from 5.6%-28% (Figure 3g). Based on the calculations, we can estimate an atom-utilization efficiency of Pt atoms of up to ~30 wt% in the amorphous PtSex, much higher than ~5 wt% in previously proposed single-atom Pt catalysts4. Such a high atom-utilization efficiency explains why the amorphous PtSex can deliver a nearly 100% current density relative to the pure Pt metal (Figures 3d-f). Thus, we coin the amorphous PtSex as single-atom-layer catalyst (Figure 3h), a new type of Pt catalyst that is superior to the widely studied single-atom and defect-enabled catalysts.
Stability and large-scale hydrogen production of amorphous PtSex catalyst
As a proof-of-concept for hydrogen generation, the 2-inch amorphous PtSex layer is transferred onto an Au substrate for mass production of hydrogen. Figure 4a shows a large amount of hydrogen bubbles produced from this catalyst (also see Supplementary Figure 34 and Movie 1). We further examine the catalytic stability of amorphous PtSex. The polarization curve has negligible loss of the cathodic current after 10,000 potential cycles (Figure 4b). The Tafel slopes after cycles persist as their initial states (see inset of Figure 4b). Furthermore, the chrono-potentiometric test (overpotential versus time) conducted for 100 hours shows that this amorphous PtSex also possesses long-term stability at both small and large current densities, i.e. 20 and 140 mA cm−2, respectively (Figure 4c).
We also made a two-electrode electrolyser cell for overall water splitting. Figure 4d shows a photograph of an assembled full-cell consisting of an amorphous PtSex layer on a FTO substrate as a cathode and an IrOx film as an anode. The reaction initially has a low onset potential of 1.25 V (see the inset of Figure 4e), close to the theoretical voltage limit (1.23 V). Meanwhile, the current density of this electrolyser is as high as 250 mA cm−2 at 1.7 V, and later reaches up to 1000 mA cm−2, as shown in Figure 4e and Supplementary Movie 2. These parameters are superior to the reported electrolysers based on thin 2D materials with a current density of 10-100 mA cm−2 at similar reaction potentials24, and are even close to those of industrial Pt and Ir electrolysers (~ 1000 mA cm−2)25,26. In real applications, the loss or deactivation of noble metal catalysts remains a major issue. To address this issue, we developed a “layer-by-layer replenishment” method of amorphous PtSex using a controlled etching (Supplementary Figures 35-36). Once the old amorphous PtSex layer becomes catalytically inactive, a new amorphous layer will be replenished. Such a process persists at least to the sixth new layer without obvious decay in current densities and Tafel slopes, suggesting a successful “replenishment”.
Figure 5a presents a general approach to achieve amorphous noble MXx libraries (M=Pt, Pd, Ir, Os, Ru, Rh; X=S, Se) via defect engineering. As the defect concentration increases, the original lattice structure is increasingly distorted. The as-produced amorphous MXx would be stable in air due to the inert nature of noble metals, as demonstrated by PtSex in our work. Indeed, our high-throughput ab initio molecular dynamics calculations suggested that all other noble metal selenide layers, such as PdSe2, IrSe2, OsSe2, RuSe2 and RhSe2, form stable amorphous layers as well (Figure 5b and Supplementary Figure 37). Notably, our preliminary experiments have realized a stable amorphous PdSex layer (Supplementary Figures 38-39). In contrast, most non-noble metal (Mo, W, Re, etc)-based MXx are unstable or even decompose in air due to the corrosion and oxidation of exposed metal atoms (see MoS2 as an example in Figure 5a and Supplementary Figure 40).