1. Piezoelectric-triboelectric hybrid output in piezoelectric devices
Figure 1a shows the schematic of the PVDF-based piezoelectric device in pressure sensing. CE can occur between the human finger and the piezoelectric device—the human finger would have positive charges and the protective layer of the device would have negative charges. As a result, a single-electrode triboelectric nanogenerator (SE-TENG) will form when the human finger is approaching the piezoelectric device again. Its working mechanism is illustrated in Fig.1b, including four typical stages, such as contacted, separating, separated, and contacting. Among these stages, the triboelectric signals are generated in the stages of contacting and separating. On the other hand, the PENG will be formed when the human finger is pressing the piezoelectric devices (right in Fig.1a), and its working mechanism is clearly illustrated in Fig.1c. The piezoelectric signals would be generated in the stages of pressing and releasing. Therefore, the SE-TENG and PENG exist during the practical application of piezoelectric devices, resulting in the triboelectric-piezoelectric hybrid output.
2. Verification of the existence of the SE-TENG system in piezoelectric devices
In order to verify the existence of the SE-TENG system during the measurement of piezoelectric devices, here we replaced the PVDF film with a non-piezoelectric material polyimide (PI) for investigation. This means that the interference from piezoelectric signals was eliminated and thus only triboelectric signals will exist during the measurement. The testing platform is illustrated in the experimental section and Supplementary Fig. 1. During the measurement, two different wiring methods were adapted including forward connection and reverse connection so as to verify whether the electric signals were generated by the testing system itself. More specifically, if there were not any interference from other signals, the electric signals generated by the device would symmetrically flip with constant amplitude when the connection direction was switched22, 23.
Figure. 2a shows a schematic diagram of measuring electric signals between the front electrode and back electrode of the PI-based device. The open-circuit voltage (Fig. 2d) and transferred charge (Fig. 2g) curves show significant electric signals in the forward connection, while the electric signals obtained in the reverse connection are very low. Thus the electric signals in the forward and reverse connection are not symmetrical along the x-axis, suggesting they are not generated by the testing system composed of the front and back electrode. This is because the Kapton layer with negative charges can induce several times more positive charges in the front electrode than the back electrode. In the forward connection, the Al plate, Kapton tape layer, and the front electrode form a SE-TENG, then triboelectric signals can be detected when connecting the signal probe with the front electrode (Supplementary Fig. 2a). By contrast, positive charges in the front electrode would flow to the ground in the reverse connection and thus weaker electric signals can be detected in the back electrode (Supplementary Fig. 2b).
To verify that CE did occur between the Al plate and the Kapton layer, two kinds of contact-separation triboelectric nanogenerators (CE-TENGs) were tested (CS-TENG-1 in Fig. 2b and CS-TENG-2 in Fig. 2c). For CS-TENG-1, it is composed of Al plate, Kapton layer, and front electrode. The voltage signals (Fig. 2e) generated by CS-TENG-1 in the forward connection and in the reverse connection are symmetrical along the x-axis. More specifically, the signs of voltage signals obtained in two connections are opposite and the amplitudes of the voltage signals are constant. The charge signals (Fig. 2h) of CS-TENG-1 have the same characteristics with voltage signals. For CS-TENG-2, it is composed of Al plate, Kapton layer, front electrode, PI film, and back electrode. Similarly, the voltage signals (Fig. 2f) of CS-TENG-2 obtained in the forward connection and in the reverse connection are symmetrical along the x-axis; the charge signals (Fig. 2i) of CS-TENG-2 obtained in the forward connection and in the reverse connection are symmetrical along the x-axis too. The above results indicate that the electric signals are generated by CS-TENGs where the Al plate and the Kapton layer constitute the triboelectric pairs, and their working mechanism is illustrated in Supplementary Fig. 3. Therefore, the SE-TENG is confirmed by the experiments, which is consistent with the theoretical analysis.
It is worth noting that the peak voltage (~1.5 V) and charge transfer (~1.1 nC) generated by SE-TENG are too large compared with polymer-based piezoelectric materials (such as PVDF, the peak voltage of them usually is several volts24, 25). Simultaneously, using a finger to tap the SE-TENG can generate larger electric signals (Supplementary Fig. 4, up to ~7 V and ~4 nC). As a result, these triboelectric charges can significantly influence the measurement of piezoelectric signals, which shouldn’t be ignored.
3. Involving force signals to differentiate the triboelectric signals and piezoelectric signals
It is essential to differentiate the triboelectric signals and piezoelectric signals before quantitively obtaining the piezoelectric charge transfer and evaluating the piezoelectric performance. Here we developed an effective method that can find the sources of the resulting electric signals by analyzing the force loading process of piezoelectric devices. And this simple method was demonstrated by successfully identifying the sole triboelectric signals and piezoelectric signals.
The sole triboelectric signals are generated by the PI-based device (Fig. 3a). The sole piezoelectric signals are generated by the PVDF-based device with a conductive shielding layer (Fig. 3b). In addition, the role of shielding layer is illustrated in Supplementary Fig. 5; the PI-based device with a shielding layer (Supplementary Fig. 5a) cannot generate any electric signals (Supplementary Figs. 5c, e), while the PVDF-based device with a shielding layer (Supplementary Fig. 5b) can generate symmetrical pure piezoelectric signals in the forward and reverse directions very well (Supplementary Figs. 5d, f).
According to the force signal (Fig. 3i), the sole triboelectric signal generation process can be divided into three stages including contacting, contacted, and separating. In the contacting stage, the Al plate is contacting with the PI-based device. At the same time, the short-circuit current ISC (Fig. 3c) and charge curve (Fig. 3g) fall gradually, while the open-circuit voltage VOC signal (Fig. 3e) rises slowly. When Al plate and the PI-based device are contacted with each other, the electrostatic balance between them is formed; the ISC signal backs to the baseline quickly, while the VOC and transferred charge signals remain unchanged. In the separating stage, the Al plate is separating from the PI-based device, which breaks the electrostatic balance that existed before, resulting in the signal rise of the ISC. Besides, the VOC and transferred charge signals go back to the baseline gradually. Differently, the ISC can reach to peak when the Al plate and the PI-based device are separated, and then falls to the baseline. Overall, there is a phase difference between the sole triboelectric signal and force signal.
By contrast, according to the force signal (Fig. 3j), the sole piezoelectric signal only occurs in the contacted stage (light green area) and its generation process can be divided into three stages including compressing, compressed, and releasing. In the compressing stage, the PVDF film experiences a repaid elastic deformation and thus the ISC (Fig. 3d) and charge signals (Fig. 3h) reach to peak dramatically, while the VOC (Fig. 3f) falls to the lowest point. In the compressed stage, the elastic deformation of PVDF film reaches the maximum value, indicating that the piezoelectric effect would not be activated further. As a result, the ISC cannot increase further and falls to the baseline; the VOC and charge signal remain unchanged. In the releasing stage, the elastic deformation of PVDF film is releasing rapidly. The VOC and charge signals go back to the baseline, while the ISC decreases to the lowest point when the elastic deformation is released and then rises back to the baseline. More importantly, the VOC and the charge signals have the same trend with the force curve, and there are no phase differences existed. Therefore, analyzing the force signal of devices is an effective method for differentiating triboelectric signals and piezoelectric signals.
4. Identifying the piezoelectric signal in “piezoelectric” output
Above results and discussion demonstrated that the effectiveness of differentiating sole triboelectric signals and sole piezoelectric signals by analyzing the force loading curve. Now we can identify the piezoelectric signals from the “piezoelectric” output. Two measurements were carried out by taking into account the direction difference between triboelectric signals and piezoelectric signals. This is because, the direction of triboelectric signals is determined by the triboelectric series and keeps constant26, and that of piezoelectric signals depends on the polarization direction of signal acquisition side.
Figure 4a is a schematic of measuring electric signals from the negative polarization side of the PVDF film. The signal generation process of the hybrid output can be divided into six parts, including contacting, contacted, compressing, releasing, released, and separating (Fig. 4b). Figure 4c shows the sole triboelectric signals and corresponding force signal of the PI-based device; Figure 4d shows the sole piezoelectric signals obtained in the negative polarization side of PVDF-based device with a shielding layer and its corresponding force signal; Fig. 4e shows the triboelectric-piezoelectric hybrid signals generated by the PVDF-based device. By manipulating the direction of the piezoelectric signals to be opposite with the triboelectric signals, the turning points (Ⅱ and Ⅴ) of electric signals can be observed in Fig. 4e. The existence of turning points not only differentiates the piezoelectric part (light green area) and triboelectric part (light yellow area) in the hybrid output, but also proves the difference between piezoelectric signals and triboelectric signals in the time domain which is discussed before. Therefore, the hybrid output can simply be regarded as the sum of the sole triboelectric signals and the piezoelectric signals.
However, if flipping the piezoelectric device and collect the hybrid output from the positive polarization side of the PVDF film (Supplementary Fig. 6a), things are different (Supplementary Fig. 6b). The hybrid output (Supplementary Fig. 6e) can still be regarded as the sum of sole triboelectric signals (Supplementary Fig. 6c) and sole piezoelectric signals (Supplementary Fig. 6d), while there are no turning points in the stages of contacted and released due to the direction of piezoelectric signals is the same as triboelectric signals.
Overall, by investigating the force loading signal of the devices, it’s very convenient to determine whether the resulting voltage signal is the triboelectric signal, the piezoelectric signal, or hybrid signal from the perspective of the time domain, while traditional voltage signal analytical methods cannot do.
Extracting the piezoelectric charge transfer from “piezoelectric” output for piezoelectric performance evaluation
For separating piezoelectric charge, a compressed balance analysis (CBA) method is used to extract piezoelectric charge transfer from the hybrid output. Specifically, as shown in Fig. 5a (Ⅰ), there is an electrostatic balance when the piezoelectric device is at the compressed stage. Q3 is the transferred charge in the Al plate, -Q2 is the transferred charge in the Kapton layer, q is the total charge transfer in the electrode which contains both piezoelectric and triboelectric parts (Fig. 5b), Q1 is the induced piezoelectric charge. Their relationship is:
Q_3-Q_2+q-Q_1=0 (1)
After flipping the device (Ⅱ in Fig. 5a), the electrostatic balance becomes:
Q_3-Q_2-q^'+Q_1=0 (2)
Where -q’ is the total charge transfer in the electrode (Fig. 5c). By making Eq. (1) – Eq. (2):
Q_1=(q+q^')/2 (3)
As shown in Eq (3), the total induced piezoelectric charge Q1 can be calculated by substituting the values of q and q’ into expression without considering the interference from triboelectric charges. Furthermore, the true piezoelectric coefficient d33 of PVDF film can be obtained by Eq (4), where F represents the applied force.
d_33=Q_1/F (4)
The transferred charge curves measured in the positive and negative polarization direction of the PVDF-based device under different forces are shown in Supplementary Figs. 7a, b, respectively. Additionally, the piezoelectric charge transfer can be extracted directly from the hybrid output by calculating the relative value in the stage of compressing (Supplementary Figs. 7c, d, and Note 1), which is called directly extracting (DE) method. In order to verify the effectiveness of above two methods, an outside shielding (OS) method is introduced to obtain the sole piezoelectric charge transfer (details are shown in Supplementary Fig. 8 and Note 2), which can be regarded as a benchmark because the triboelectric part is eliminated. Figure 5d shows the charge-force curves obtained by the above three methods. Importantly, the calculated d33 of CBA is 33.74 pC/N and that of DE is 32.64 pC/N, which are nearly consistent with the shielded device (33.20 pC/N). Simultaneously, the transferred piezoelectric charges calculated by these three methods in different force loading are almost equal (Fig. 5e). Furthermore, a commercial piezoelectric meter is also introduced to measure the d33 of the PVDF film (Supplementary Fig. 9). The average d33 measured by this instrument is 33.05 pC/N, which is consistent with the aforementioned results, indicating that these three methods are both effective. By contrast, the fake piezoelectric performance would be always obtained when just using the apex or bottom of electric signals that contain the triboelectric part and piezoelectric part as the evaluation index. Therefore, our method CBA can be used for separating the piezoelectric component from the triboelectric-piezoelectric hybrid output, and evaluating piezoelectric performance without influenced by triboelectric signals.